Nicolet ECO 1000 FT-IR度量工具

High-performance FT-IR metrology tool for 100 mm to 200 mm wafers

 

Nicolet ECO 2000 FT-IR度量工具

High-performance FT-IR metrology tool for 200 mm SMIF carriers

 

Nicolet ECO 3000 FT-IR度量工具

High-performance FT-IR metrology tool for automated 300 mm wafer handling

 

Nicolet ECO/RS晶片剖析系统

Completely integrated wafer profiling stage with FT-IR spectrometer & software